Research projects


VacuuMEMS - OPUS 5 (11.03.2014 – 10.03.2017)

The aim of the project financed by Poland’s National Science Centre, entitled “Generation of high vacuum in micro- and nanosystems” is elaboration of the efficient, ion-sorption, MEMS-type (Micro-Electro-Mechanical System) vacuum micropump and determination of the mechanisms responsible for generation of vacuum in microcavity (V < 1 cm3). The problems of generating and maintaining of high vacuum in microdevices are well known and are indicated in the world literature. However, the described and currently used methods of vacuum sealing and technique of MEMS getters allow obtaining only 10‒3 hPa. The project is planned to investigate the fabrication process of several versions of MEMS micropumps and achieve the main goal that is a significant reduction of pressure inside a microcavity. Because the mechanism standing behind a generation of high vacuum in microcavity is unknown, in this project the physical phenomena will be characterized. Our research team as a first presented the MEMS-type ion-sorption micropump for producing high vacuum in microcavity. The influence of the different parameters (electrode materials, size of a structure, type of pumped gas, magnetic field) on the pumping properties will be examined. Firstly the measurements of various test structures will be carried on in a reference high vacuum chamber. Next the long time working elements of the micropump will be characterized in a series of fundamental experiments (XPS, SIMS, AFM, and interferometry). It will allow distinguishing what is the most important process responsible for gas pumping and how the micropump construction can be optimized to maximize gas ionization, ion sorption efficiency, pumping speed, repeatability and long term stability. In the final phase of the project, the operation of vacuum sealed micro pump will be investigated. Attempts of full integration of the micropump with the selected MEMS microsystems will be made.

MEMS TEM - OPUS 11 (23.02.2017 – 22.02.2020)

The objective of the project financed by Poland’s National Science Centre, entitled “Miniature MEMS-type transmission electron microscope” is to examine the possibility of manufacture of electron microscope using MEMS (Micro-Electro-Mechanical System) technology, according to a completely new concept that involves the integration of all the elements of electron microscope on a single chip. The main condition to achieve this goal is to prepare all the individual components of the microscope, using the same materials and the same fabrication processes. According to our assumptions microscope on-chip will be constructed as a silicon-glass multilayer structure, comprising a field electron source, an electron optics column, a high vacuum micropump, a detection system and an observation microchamber. All the elements will be hermetically encapsulated and will form together a vacuum housing. In the final step the model of a complete microscope will be prepared and its functional parameters will be examined. The most evident advantages of the proposed solution will be its small size, light weight and low price, which should lead to more common application, not only in specialized laboratories. The success of the project will have also high scientific value. It would be the first evidence that it is possible to apply a MEMS technology to form a complete miniature electron beam devices. It would open up a way to fabricate other small-scale devices like miniature X-ray and THz sources, free electron lasers and mass spectrometers. So far they exist either at the concept stage or do not meet all the requirements of miniaturization.


FP7 logo Labonfoil logo
LabOnFoil is the acronym chosen to designate the project named "Laboratory Skin Patches and SmartCards based on foils and compatible with a smartphone". The project aims ultra-low-cost laboratories on chips without compromising time response, sensitivity or simplicity of use. The user will obtain the test results using a smartphone and a set of Labcards and skin patches, where the sample preparation and detection take place.


FP7 logo MAC-TFC logo
MEMS Atomic Clocks for Timing, Frequency Control & Communications. Atomic clocks provide enhanced accuracy, stability, and timing precision compared to quartz-based technologies. However, the size and power consumption of existing atomic clocks far exceeds those of quartz-based clocks, preventing their deployment in portable applications. MEMS technology, with its ability to shrink mechanical features and mechanisms down to micron scales, already provides substantial size and power reduction for applications spanning wireless communications, sensors, and fluidic systems, and is now emerging to provide similar advantages for frequency and timing references.


FP6 logo Nepumuc logo
New eco-efficient industrial process using microstructured unit components - safe and environmental friendly production of sensitive compounds ensured by process intensification. The overall goal of the NEPUMUC project is to make the benefits of microreaction technology available for industrial purposes, in particular nitration chemistry. Therefore, the project partners will jointly develop, test and evaluate a new microreaction process as a prototype to demonstrate that even under industrial requirements microreaction technology can be made available in a flexible and multi-purpose manner.


FP6 logo Performance logo
A science base on PV performance for increased market transparency and customer confidence. The general idea behind the PERFORMANCE project is to provide the PV community with tools to measure the quality of products - devices, systems and services - to ensure their usefulness and reliability, and to deliver data to predict the useful lifetime of the products. The project will develop reliable test & calibration procedures for standard and for innovative types of PV modules, it will harmonise measurement and evaluation techniques for PV systems.


FP6 logo BIPV-CIS logo
Improved Building Integration of PV by using Thin Film Modules in CIS Technology. A European survey on the potential and needs for building integrated PV components and systems will identify the basis for the development of modules away from the glass/window-like appearance. In the project PV roof tiles, overhead glazing and facade elements based on CIS thin film technology will be developed and investigated which have a modified optical appearance for better adaptation to the building skin.


FP6 logo Optolabcard logo

Mass produced optical diagnostic labcards based on micro and nano SU8 layers. The project aims the development of a quick and low-cost diagnostic device (Lab on a Card) that develops and integrates technology advances in optoelectronics, microfluidic and microbiology, capable to detect, in-situ, DNA pathogens in 15 minutes. The device consists of a hand held base unit and a cartridge or labcard that will carry out a Real Time Polymerase Chain Reaction automatically, from sample preparation to an optical detection. The successful achievement of this project will open the door for many other analytical miniaturisation to be developed.


FP6 logo PV-Catapult logo
European Collaboration for identification of PV research and markets opportunities, socio-economic studies, performance assessment, and dissemination of PV and PV-thermal technology. The objective of PV Catapult is to coordinate activities in the field of photovoltaic. The main areas of work that will be developed are: design alternative strategies for European PV sector; facilitate the transfer of results from the European Research to the European PV industry; determine PV market potentials and develop a roadmap; engage the construction sector to enhance uptake of photovoltaics; identify opportunities and barriers in a changing European Market; work on measurement standards and prediction of the performance of PV modules.


Innowacyjna Gospodarka logo MNS DIAG logo
MNS DIAG project aims developing of constructional and technological innovative solutions of micro- and nano- systems designed for chemistry and biomedical diagnostics. Outcome of the cooperation within the project will be developing of 5 analitycally-diagnostic demonstrators, including the instrument for fast and cheap qualitative analysis of cattle embryos (APOZAR).


FP5 logo

Advanced Facade and Roof Elements Key to Large Scale Building Integration of Photovoltaic Energy. The objective of this work is to improve the acceptability of building integrated renewable energy conversion by developing high performance photovoltaic building elements with a high visual appeal. Supporting the development of the new products with both reliability testing and an extended outdoor performance evaluation, a number of highly efficient demonstrator building elements have been manufactured.


Innowacyjna Gospodarka logo CIS POIG logo
Elaboration of a miniature laboratory on a chip (Lab-on-chip) for real time PCR analysis of DNA is a research purpose of the Project "Biological sensor based on bioreactor PCR in LTCC technology". It will be microsystem device, which consists of LTCC biochip with heating circuits and optical detection system utilizing fluorescence technique. This work is carried out for Escherichia Coli, which often occurs in water environment and constitutes a serious threat for animals and human health.